The guide on the first post of this thread isn't bad to get started.  There is also a link to a script someone wrote to automatically set up ten nodes at a time.  I was able to use that to figure out the details I needed.  I set up a vps this morning with 6 master nodes on it.  Took about an hour, but it all seems to be up and working.

Some points.

When I create the vps, I turn on IPv6 support.  I then have to modify the networking startup to assign the addresses I want to my interface.  I also add a couple gig of swap space.  Not sure I need it (I use a 1G ram vps), but better set up now before I start rather than have it run out of memory later.

I then create 5 (or 6) directories for the data dir for master node (mkdir ~/.baby1 ~/.baby2 ~/.baby3 etc...).  Then then cheat and scp a copy of the whole data dir from another working master node.  This is just for expediency as  I could just wait for it to download the blockchain.

I also bring up one master node at a time.  Basically following the guide from page 1 in terms of steps.  

Anyway take a look at that script I mentioned and ask if you have any questions.  There are people here how have created many more master nodes than me.