I don't own an ATM and I'm not into this business. This website suggests that an ATM would cost around $400 to $14,500 depending on the model.

https://hermesbitcoin.com/host/why-your-business-host-should-host-a-bitcoin-atm/#1627998287550-25fb8480-5572

I'm sure they do. That's really the sole business in bitcoin ATMs. Per transaction a customer makes, you get a commission in the form of added charged fee.