130nm (110nm)
90nm (80nm)
65nm (55nm)
45nm (40nm)
32nm (28nm)
22nm (20nm) *
* Nobody is making processors @ 22nm except Intel (not even AMD or NVidia). A couple of memory companies are using 22nm but memory is magnitudes simpler than a microprocessor. TSMC will begin early (i.e. insanely out the butt expensive) production of 20nm in Feb 2014.
Generally it takes around 3 years before a new process node becomes cheaper than the prior node. That would put 22nm/20nm at cost parity compared 28nm not occuring until ~2017.
IBM is actually producing 22nm on their process for the next POWER series which available for order next year. TSMC and GloFo won't have 22nm until 2015 or 2016.